| 학회 |
한국고분자학회 |
| 학술대회 |
2007년 봄 (04/12 ~ 04/13, 제주 ICC) |
| 권호 |
32권 1호 |
| 발표분야 |
고분자 계면 및 표면 |
| 제목 |
Water diffusion into hydrophobic polymer thin film Investigated by X-ray reflectivity analysis |
| 초록 |
The diffusion phenomena of water into PMMA polymer thin film was investigated by X-ray reflectivity analysis which can give information about density profile inside thin film through fitting process. The diffusion was controlled by water contact time and two contact methods: one is the immersion of whole samples in distilled water and the other is water contact at the film surface only. The result suggests that there is the certain period of time that the density uniformity inside film is breakdown during the water contact. Since the diffusion velocities at interfaces and film inside are different, there can be ‘water rich layer’ at the top of the film (surface) or even at the bottom of the film (interface) as the method of water-contact were varied. |
| 저자 |
안성일1, 김정훈1, 김재현2, 진왕철1
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| 소속 |
1포항공과대, 2삼성전자 |
| 키워드 |
x-ray reflectivity; photoresist; diffusion
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| E-Mail |
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