| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | A. 전자/반도체 재료 분과 |
| 제목 | Hydrothermal Synthesis of Forsterite (Mg2SiO4) Nanoparticles and Low-temperature Densification for Millimeter-wave Device Application. |
| 초록 | For 5G+, 6G mobile communications, millimeter-wave (mm-W) is expected to be applied for high speed and larger data transfer. At the mm-W region, a low dielectric constant(εr) and high quality factor (Q) is required to minimize signal loss and time delay. In addition, for integrated electronic components, low-temperature densification technology of ceramics, so-called low-temperature co-firing ceramics (LTCCs), has been also needed to co-fire with highly conductive and inexpensive metal electrodes. Forsterite (Mg2SiO4), which has a low εr ~ 7.00 with a high Q at high frequency, is one of the promising crystalline dielectric materials for mm-W device application. Densification of forsterite, however, is difficult caused by its high sintering temperature (＞1400oC) and even higher. In this study, for low-temperature densification, nano-sized forsterite was synthesized by hydrothermal reaction at 250oC, utilizing nano-sized amorphous silica spheres and magnesia as sources, respectively. Moreover, the Oxyfluoride system sintering was investigated, utilizing sintering aid such as LiF, MgF2. For the synthesized nanoparticles, the orthorhombic forsterite phase was obtained as the main phase. Along with the forsterite phase formation, the trace level of the enstatite (MgSiO3) was observed as the secondary phase. Forsterite ceramics were fully densified at below 1000 oC and dense microstructure with nano-grains was obtained. The micro/millimeter-wave measurements of the dielectric properties were discussed in 10~20GHz. |
| 저자 | 성우준, 김정윤, 권석은, 권도균 |
| 소속 | 한국항공대 |
| 키워드 | Forsterite; Hydrothermal synthesis; Low-temperature co-fired ceramics; Micro/Millimeter-wave |
