| 초록 |
Atmospheric pressure plasma for the CHF3 decomposition in a mixture with O2 and Ar was investigated in a coaxial dielectric barrier discharge. The decomposition rate of CHF3 increased linearly regarding specific energy input (SEI), whereas energy efficiency decreased. CO2 was the main product of plasma reaction, and the selectivity of CO2 increased with high SEI and the presence of O2 in the feed, but a decrease in decomposition rate with an increase of O2 in the feed. An increase of the absolute amount of CHF3 decomposition and energy efficiency were a result of increasing total flow rate; however, the decomposition rate of CHF3 decreased. The available reaction pathways for CHF3 decomposition in the CHF3/O2/Ar atmospheric plasma was showed by optical emission spectroscopy analysis. |
