| 학회 | 한국재료학회 |
| 학술대회 | 2009년 봄 (05/21 ~ 05/22, 무주리조트) |
| 권호 | 15권 1호 |
| 발표분야 | 전자재료 |
| 제목 | Effects of Saccharin Concentration on Deposit Stress Behavior of Electrodeposited Ni-Co-Fe Ternary Alloy Films |
| 초록 | Recently, the Ni-Co-Fe films have been studied for its magnetic properties, internal stress, corrosion properties, etc. It is reported that the electrodeposited Ni-Co-Fe films have the high deposit stress. The high deposit stress in the magnetic films may result in the warpage of substrate or the delamination of films, which makes difficult to apply to MEMS devices. Also the high stress may result in the changes of the magnetic properties. In this study, we systematically investigated changes in the film stress, microstructure, and magnetic properties of the Ni-Co-Fe thin films as a function of saccharin concentration in the plating baths. Ni-Co-Fe ternary alloy films were electrodeposited from the sulfate bath. The effects of the saccharin concentration on the deposit stress behavior of those films were investigated. When the saccharin concentration was 0.004 M, the deposit stress was the lowest stress (61 MPa, tensile stress mode). Then the relation of the deposit stress and the magnetic properties was investigated. As the deposit stress of Ni-Co-Fe thin films decreasedfrom 307 to 61 MPa, the coecivity decreased from 6.17 to 1.35 Oe. |
| 저자 | 김진수, 주범석, 나성훈, 임승규, 김종천, 서수정 |
| 소속 | 성균관대 |
| 키워드 | NiCoFe; electroplating; magnetic properties |
