| 초록 |
Molybdenum Oxides are promising active materials and electrically-conductive supports for lithium ion batteries and other devices. In this study, nanostructured molybdenum oxides are prepared in a flame vapor deposition (FVD) system. This FVD system consists of a premixed flame reactor embedded with a constant wire feeder, which is able to control the feed rate as low as 1um/s and ensures the constant vapor concentration during thin film deposition. The morphology of molybdenum oxides thin films were controlled by adjusting various process parameters including molybdenum wire feed rate, deposition height and gases flow rate ratio. Nanostructures of molybdenum oxides on different substrate were also compared in this study. The possible growth mechanism of various nanostructures were proposed. |
