| 초록 |
Transparent conductive oxide (TCO) thin films are important and integral part of a number of electro optical devices. Typical TCO is indium tin oxide (ITO), which offers commercially acceptable performance. However, the chemical instability, toxic nature, and high cost due to the scarcity of indium have led researchers to seek alternative candidates for ITO. Doped zinc oxide is considered as one of the most promising candidates because of its high mobility, optical transparency, low cost, non-toxicity, low process temperature, and tunable electrical conductivity. Al doped ZnO thin film which is called AZO has promoted the development of inexpensive materials. However, the resistivity of AZO is rather high in some case to adapt as a transparent electrode for advanced applications. Recently, TCO-metal-TCO multilayer system also has been tried and studied for improving the conductivity and flexibility. In this study, the effects of thickness of an embedded metal Au layer on the electrical and optical properties of AZO/Au/AZO multilayer films were investigated. Optical and electrical properties were correlated with Au thickness. Film thicknesses and structure were measured using transmission electron microscopy (TEM). Hall effect measurement, four-point probe, and UV-Vis spectrophotometer analyses were used to characterize electrical and optical properties of multilayer films. The multilayer films exhibited a decrease in resistivity from 2.9×10-3 to 1.2×10-4 Ω•㎝ as the Au layer thickness was increased. |
