| 초록 |
Porous ceramics were fabricated for the purpose of vacuum vise, or so called vacuum chuck. We could produce the world largest sized vacuum vise, up to 2,500 mm. This porous ceramics were sintered in liquid phase, and do not emit dusts, unlike other sintered porous ceramics, because normal porous ceramics are sintered by not completing sintering process to avoid full densification (1). The pore size is less than 40,000 nm not to form dimples on the surface of chucked substrates. Normally, we have to cover all the surface of chucks to be griped by vacuum. Although recent requirements to be applied in electronics industries, for example, need to grip or hold different sized sheets. We could manage to produce a vacuum vise, which can grip almost any size of sheets without covering the whole surface of the vacuum chuck. Other applications of the unique porous ceramics are also discussed. |
