| 초록 |
The electrical biosensor which exploits nanostructured semiconductors is a promising candidate to realize high sensitivity, label-free system, and direct electronic signal for biomolecule detection. In this work, a nanopatterned electrical biosensor is fabricated by block copolymer lithography and is used for the selective detection of similar structure model proteins. A cost-effective and large-area nanofabrication, based on BCP self-assembly and single-step dry etching, is developed for the hexagonal nanohole patterning of thin silicon films. The resultant nanopatterned electrical channel modified with biotin molecules successfully detects the two proteins, streptavidin and avidin down to nanoscale molarities. This nanofabrication based on scalable self-assembly approaches offers a high throughput manufacturing route for clinical lab-on-a-chip diagnosis and relevant biomolecular studies. |
