| 초록 |
Next generation microelectronic aims at high performance devices, which significantly requires miniaturized and ultrafine patterns. Recently, block copolymer (BCP) has emerged as an attractive material to overcome the size limit of the conventional lithography, where Flory-Huggins interaction parameter (χ) is the key to control the BCP pattern size. In this study, we designed a fluorine-containing high-χ BCP which was synthesized by transesterification from precursor BCP. High-yield conversion was achieved using a polymeric catalyst, where the polymer dispersity remain unchanged. Evaluated χ was above 0.2 over the entire temperature range which is 7 fold higher than polystyrene-b-poly(methyl methacrylate). Sub-10 nm lamellae morphology was obtained and the smallest half-pitch feature size was 5 nm from 6.3 kg/mol BCP. Thin film was applied to observe a perpendicular structure resulting a sub-10 nm perpendicular lamellae in as-spun film. |
