| 초록 |
In order to improve the barrier properties to water vapor, a inorganic-organic multilayer films were on plastic substrates for flexible display. The multilayer consisted of the inorganic layer(SiOxNy) acting as mainly barriers and polymer layer (UV curable acrylate) acting as flexible overcoats which decrease roughness of inorganic layer. The inorganic layer was deposited from HMDS [SiNH(CH3)6] using conventional plasma system. The polymer layer was prepared with various combinations of resin and monomers was spin-coated. The formation and adhesion stability were characterized using IR spectroscopy, AFM and tape-full test. To characterized organic-inorganic multilayer deposited PES substrate, we also measured WVTR, tranmittance, refractive index, CTE, etc. As a results, the mulitilayer deposited on PES substrate showed stable formation and slightly increased the water vapor barrier property compared with uncoated PES substrate. |
