초록 |
Randomly bended nanopillar structure with high aspect ratio has wide applications, such as, anti-fogging, anti-reflecting, super-hydrophobicity, etc. Despite of the wide applications, there are still limited fabrication processes suffering from large-area fabrication. We present a new fabrication process for the structure with controllable bending degree by irradiation of flood electron beam under ambient pressure. Under irradiation of flood electron beam causes radiolysis reaction of UV curable polyurethane acrylate (PUA) producing CO2 outgas. It causes their bending and shrinking. Also, Monte Carlo Simulation shows that electrons traveling through the air undergo severe scattering. Therefore, nanopillars fabricated with PUA are bended in random direction. Controllability of bending degree is achieved by controlling of irradiation time. In sum, Irradiation of flood electron beam shows promising results having capability of large-area fabrication of randomly bended nanopillars. |