초록 |
Stretchable electronics have recently been extensively investigated for development of highly advanced human-interactive devices, by using elastomeric templates. However, mechanical properties of transistor components cannot keep up with the high stretchability of the elastomeric substrate, resulting in a problem that the device electrical performances are drastically decreased. Herein, a hard parylene-C layer was deposited on the pre-strained Ecoflex surface to fabricate a corrugated substrate which is a structure that can prevent damage against the external force. The metal electrode, the dielectric (parylene-C), the organic semiconductor (DNTT) layers were formed thereon. As the results, a maximum and average field-effect mobilities of 0.83 and 0.65 cm2/Vs, respectively, was measured, and these device performances were maintained up to 43% strain. In particular, the results remained stable even when 20% tensile was repeatedly applied 1000 times. |