| 학회 |
한국재료학회 |
| 학술대회 |
2010년 가을 (11/11 ~ 11/12, 무주리조트) |
| 권호 |
16권 2호 |
| 발표분야 |
F. Display and optic Materials and processing(디스플레이 및 광 재료) |
| 제목 |
ZnO 기판과 격자정합된 deep-UV 영역 ZnMgAlO, ZnMgSrO 박막의 성장과 특성 평가 |
| 초록 |
Quaternary ZnMgAlO and ZnMgSrO films were grown by the magnetron sputter technique, with the y/x ratio designed to maintain the lattice matching condition using the Vegard’s rule. The XRD spectra of the Zn1-x-yMgxAlyO films with x/y ratio of ~2.8 clearly indicated that the films are lattice matched to the ZnO substrates. The CL measurement showed that near-band emissions from the quaternary films move toward higher energy with addition of MgO and Al2O3, from ~380nm for the ZnO to ~300nm for the Zn0.83Mg0.12Al0.05O/ZnO films. Electron microscopy inspection indicated that the films are single crystalline. XRD and electron microscopy observation indicated that the Zn1-x-yMgxSryO films with x/y ratio of ~1.5 are also lattice matched to the ZnO substrates. CL UV emission peaks were observed at 308nm for the Zn0.75Mg0.15Sr0.10O film and at 337nm for the Zn0.88Mg0.07Sr0.05O film. It is believed that these quaternary materials systems, with wide energy bandgap and lattice constant(s) matched to the ZnO (and in fact also to the SiC) substrates, would be strong candidate materials to achieve high performance ZnO-based UV devices. Further details of the film properties will be discussed during the presentation. |
| 저자 |
이병택, 김일수, 박장호, 윤내상, 임진범
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| 소속 |
전남대 |
| 키워드 |
ZnO; UV; LED
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| E-Mail |
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