화학공학소재연구정보센터
학회 한국재료학회
학술대회 2011년 가을 (10/27 ~ 10/29, 신라대학교)
권호 17권 2호
발표분야 B. Nanomaterials and Processing Technology(나노소재기술)
제목 Effects of The tri-sodium citrate concentration on the properties of the Ga-doped ZnO thin film
초록 In this study, Ga-doped ZnO (GZO) thin films were prepared on 100 nm-thick ZnO seed glass substrates with different tri-sodium citrate (Na3-citrate) concentrations by hydrothermal technique at 60 °C. ZnO seed layers were deposited by RF magnetron sputtering method at room temperature. Effects of the Na3-citrate concentrations on the structural, electrical, and optical properties of the GZO thin films were investigated. X-ray diffraction studies showed that all of the deposited films were grown into a polycrystalline wurtzite phase with a preferred c-axis and diffraction peaks of {000l} family were only observed without unwanted phase (Ga2O3).The thickness and microstructure of GZO thin films strongly depended on Na3-citrate concentrations. UV-Visible spectroscopy studies showed that the GZO thin films showed a high transmittance with a range from 75 % to 90 % in the visible region and optical band gap increased from 3.28 eV to 3.33 eV with increasing Na3-citrate concentrations. The GZO thin film deposited at 1.6 ×〖10〗^(-3) M of Na3-citrate concentration have the lowest electrical resistivity of 4.65×〖10〗^(-2) Ωcm and the highest carrier concentration of 1.83×〖10〗^19 cm^(-3).
저자 Myeng Gil Gang1, Seung Wook Shin2, Jun Hee Han1, Yin Bo Wang3, Jong-Ha Moon1, Jeong Yong Lee3, Jin Hyeok Kim1
소속 1Department of Materials Science and Engineering, 2Chonnam National Univ., 3KAIST
키워드 Ga doped ZnO (GZO); Hydrothermal; Tri-sodium citrate; Microstructure; Low growth temperature (60 °C)
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