| 초록 |
The synthetic method of TEOS was studied through the direct reaction between metallic silicon with ethanol under various reaction conditions such as reaction temperature, ethanol feed rate, alkli salt of diethlyene glycol monoalkyl ether [R-(OCH2-CH2)2-OM] as the catalyst, and the molar ratio of reactants etc. The reaction was optimized at 175℃ with use of diethylene glycol monoethyl ether sodium salt (DEGEE-Na) catalyst. TEOS was obtained as a main product along with the small amounts of by-products such as hexaethoxydisiloxane, 2-ethoxyethoxy(triethoxysilane) [2-EE(TES)] and 2-(2-ethoxyethoxy)ethoxy(triethoxysilane) [2-EEE(TES)] were obtained. In this presentation, we will discuss the development of aprocess for the synthesis of TEOS from metallic silicon and its reaction mechanism. |
