| 학회 |
한국공업화학회 |
| 학술대회 |
2005년 봄 (05/13 ~ 05/14, 충남대학교) |
| 권호 |
9권 1호 |
| 발표분야 |
나노 |
| 제목 |
Fabrication of Nano-scale SiCN Ceramic Patterning using Photocurable Polyvinylsilazane Copolymer via UV-NIL and TPA |
| 초록 |
A photocurable inorganic polymer precursor was synthesized by reaction of Cinnamoyl chloride with polyvinylsilazane. The reaction product contain higher fraction of vinyl group, which improve curing of the inorganic polymer on UV irradiation. Fabrication of nano-scale SiCN ceramic patterns were demonstrated using UV-NIL as well as by Two-photon absorption(TPA) for the first time. The morphologies of SiCN ceramic patterns were studied by Atomic Force Microscopy(AFM) and Scanning Electron Microscope(SEM), while Thermal Gravimetric Analysis(TGA) was used to study high temperature stabilities. |
| 저자 |
이동훈, 홍난영, 김동표
|
| 소속 |
충남대 |
| 키워드 |
Ceramic Patterning; UV-NIL; TPA
|
| E-Mail |
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