| 초록 |
Preceramic polymers are promising materials to fabricate micro- or nano-scale ceramic structures in the components of MEMS devices using various lithography techniques because of their outstanding chemical and physical stability. In this study, nano-scale SiCN ceramic patterns were fabricated by UV-NIL technique with low pressure of PDMS mold, and nanostereolithography with two photon absorption dye and femto laser, followed by pyrolysis at 800oC under nitrogen atmosphere. The UV-curable preceramic polymer was synthesized by modifying polyvinylsilazane with isocyanato containing compounds via insertion or linkage reaction routes. The chemical structure of the synthesized polymer was analysized by NMR and FT-IR spectra. Eventually, the morphology of the SiCN-based ceramic patterns was characterized by Scanning Electron Microscopy (SEM). |
