화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2003년 가을 (10/10 ~ 10/11, 부경대학교)
권호 28권 2호, p.292
발표분야 특별 심포지엄
제목 Gas barrier properties of plastic substrates
초록 The researches and developments about plastic based flat panel display have been widely advanced. Gas barrier property is hot issue in application of plastic substrate to flexible display.The objective of this research is to enhance the gas barrier property of plastic substrate. The inorganic layer (Al2O3, SiOx) is deposited at the lowest thickness for effective gas barrier layer. The gas barrier property in the substrate is improved through depositing organic and inorganic multi layer on plastic film by PVD, ALD and CVD process.
저자 황희남1, 이기호1, 김인선1, 심준호2, 곽순종2, 김성태3, 이영철3
소속 1(주)아이컴포넌트, 2한국과학기술(연), 3한국생산기술(연)
키워드 gas barrier property; PVD; CVD
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