초록 |
Since the discovery of porous silicon (PSi), PSi has been intensively investigated for a variety of applications such as chemical and biological sensors, medical diagnostics, optical band pass filters, micro chemical reactors, and micro fuel cells. The nanostructured PSi containing photonic band gaps were generated by an electrochemical etching through applying a computer-generated current waveforms. The fabrication, optical characterization, and surface derivatization of the PSi were described. Possible applications of PSi such as chemical sensor, biological sensor, and drug delivery system will be presented. |