| 초록 |
Novel porous silicon chip exhibiting dual optical properties, both Fabry-Perot fringe(optical reflectivity) and photoluminescence had been developed and used as chemical sensors. The surface of PSi was characterized by FTIR instrument. The porosity of samples was about 80%. Three different types of porous silicon, fresh PSi (Si-H terminated), oxidized PSi (Si-OH terminated), and surface-derivatized PSi (Si-R terminated) were prepared by the thermal oxidation and hydrosilylation. While polar molecules exhibit greater quenching photoluminescence, molecules having higher vapor pressure show greater red shift for reflectivity. |
