학회 | 한국고분자학회 |
학술대회 | 2005년 봄 (04/14 ~ 04/15, 전경련회관) |
권호 | 30권 1호, p.680 |
발표분야 | 분자전자 부문위원회 |
제목 | 3D Micro Lens patterning by Two-Photon Photopolymerization using New Ethynylenephenylene TPA Chromophore |
초록 | Simultaneous and degenerate two-photon absorption (TPA) can induce photopolymerization in a confined volume inside the medium by an intense light source like laser. In 1965 for the first time Pao and Renzepis reported multi photon absorption photopolymerization by irradiating Ruby laser (694 nm) into a sample of styrene monomer.1 After this work, two photon photopolymerization (TPP) have generated great interests in various applications like information, optical communication, and nano technologies. In particular, TPP provides an innovative way to build 3D micro-optoelectromechanical systems (MOEMS) constructed rapid prototyping lithography2 so far. Conventional laser prototyping constructs 3D object through layer-by-layer process in which 2D sliced planes from 3D CAD patterns are solidified from the bottom to the top at different height levels. However, TPP can build 3D patterns like micro gears, multichannel waveguides, optical mirrors, and photonic bandgap devices in one step.3 Recently researches in this area focus on the reduction of resolution down to the submicron and enhance their physical and optical properties. In addition, molecules of large TPA cross sections enable to make use of inexpensive lasers. In this poster, we fabricated voxels by changing exposure time and achieved a lateral spatial resolution down to 90 nm using highly efficient ethnylenepheylene TPA chromophores (Fig. 1 A) exhibiting 1260 GM in z-scan method. Also we have investigated the effects of voxel distance on the surface profile (Fig. 1 B) by changing distance between voxels in order to manufacture th micro lens. Figure 1. SEM images of voxels (A) and a square (B) in dimension of 4.4 x 4.4 µm. References 1. Y. H. Pao, P. M. Renzepis, Appl. Phys. Lett., 6, 93 (1965). 2. T. Nakagawa, Y. Marutani (eds), Layered manufacturing systems: the latest development of three dimensional copying technologies (in Japanese), 1996, Kygyo Chosakai, Japan. 3. H. B. Sun, S. Matsuo, H. Misawa, Appl. Phys. Lett., 74, 769 (1999). |
저자 | 김란희1, 이광섭2, 강승완1, 이신욱3, 공홍진1 |
소속 | 1한남대, 2신소재공학과, 3화공정보소재공학부 |
키워드 | two-photon absorption photopolymerization; ethynylenephenylene TPA chromophore; three dimensional fabrication; voxel distance |