| 초록 |
Multicomponent nanopatterns offer diversities in the pattern shape, chemical composition and corresponding functionality. Currently, they are created by colloidal nanoparticle assembly, where large-area processing of highly ordered nanostructures raises significant challenge. We present multicomponent nanopatterns enabled by block copolymer (BCP) self-assembly that provides lithography templates for dense sub-10-nm scale features with high-throughput manufacturability, which is hardly attainable by other patterning methods. We develop nanopatterns direct the nanoscale lateral ordering of the overlaid second level BCP nanopatterns to create the superimposed multicomponent nanopatterns. This approach introduces diverse chemical composition of metallic elements into sub-10-nm scale naopatterns. As immediate applications, we demonstrate charge-trap memory device with Pt-Au binary nanodot pattern and synergistic plasmonic properties of Au nanowire-Pt nanodot pattern. |
