| 초록 |
Porous silicon exhibiting dual optical properties, both Fabry-Prot fringe (optical reflectivity) and photoluminescence had been developed and used as chemical sensors. Two different types of porous silicon, fresh porous silicon (Si-H terminated) and oxidized porous silicon (Si-OH terminated) by the thermal oxidation, were prepared. Then the samples were exposed to the vapor of various organics. Both reflectivity and photoluminescence were simultaneously measured under the exposure of organic vapors for sensing VOC's.-This research was financially supported by the Ministry of Coomerce, Industry and Energy (MOCIE) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Regional Innovation. |
