| 학회 |
한국고분자학회 |
| 학술대회 |
2012년 봄 (04/12 ~ 04/13, 대전컨벤션센터) |
| 권호 |
37권 1호 |
| 발표분야 |
분자전자 부문위원회 |
| 제목 |
Template-Assisted Fabrication of TiO2 Nanotube Arrays via Si-Containing Block Copolymer Lithography and Atomic Layer Deposition: Properties and Potential in Photovoltaic Devices |
| 초록 |
Highly ordered freestanding TiO2 nanotube arrays with various wall thicknesses were fabricated by applying atomic layer deposition (ALD) to the nanoporous templates with high aspect ratios. The high thermal stability of the cross-linked organic template allowed high-temperature ALD. Easy removal of the organic template by a dry etch process followed by calcination produced vertically aligned and highly crystalline anatase TiO2 nanotube arrays without collapse or bundling. Furthermore, the ultrafine thickness tunability of the ALD process made it possible to develop TiO2 nanorods as well as nanotubes with different wall thicknesses. In addition the viability of TiO2 nanotube arrays deposited on indium tin oxide glass electrodes for application in hybrid P3HT:TiO2 solar cells is studied. |
| 저자 |
조경천1, 정경옥1, 박창홍1, 권세훈2, 김진백1
|
| 소속 |
1한국과학기술원, 2부산대 |
| 키워드 |
TiO2; atomic layer deposition (ALD); block copolymer lithography; template
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| E-Mail |
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