| 초록 |
The effects of surface treatment of dielectric layer and source/drain electrode in bottom contact organic thin film transistors (BC-OTFTs) have been investigated. UV-O3 , OTS, MNB treatments were employed for the purpose. BC-OTFTs were fabricated on glass wafers which were patterned using a photolithographic process. The channel length varied from 50 to 400 μm with the channel width of 1 and 2 mm．Pentacene was used the active layer. The film structure and morphology were investigated by X-ray diffraction and atomic force microscopy and I-V characteristics were measured by semiconductor parameter analyzer (Agilent 4155C)．We obtained mobility , on-off ratio, threshold voltage, subthreshold slope. Contact resistances and corrected mobility were extracted using the extrapolation method of channel length, which were varied depending on the surface treatments. |
