화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2013년 가을 (10/23 ~ 10/25, 대구 EXCO)
권호 19권 2호, p.1868
발표분야 재료
제목 Direct Fabrication of Hexagonally Ordered Ridged Nanoahrcitectures via Dual Interference Lithography for Efficient Sensing Applications
초록 Recently, great attention for developing large-area three-dimensional (3D) nanostructures with sub-micrometer scale periodicity have been attracted because of their potentials for various applications, including photonic or plasmonic crystals, and regular templates for sensing platforms. Here, we report a direct and rapid fabrication method of the novel hexagonally ordered ridged nanostructure (HORN) arrays with controllable number of stacks on the surfaces along the third dimension using dual interference lithography (IL), derived from both a novel top-cut prism and a substrate underneath polymer film. After isotropic metal deposition on the polymeric nanostructures, corresponded metallic HORN arrays showed tunable SERS signals depending on the number of nanogaps between adjacent metallic stacks with large-scale sample homogeneity. In addition, our freely suspended ridged nanostructures showed a potential for particle-based SERS platforms obtained by dissolving the sacrificial layer to detach arrays from the substrate.
저자 전환철, 전태윤, 심태섭, 양승만
소속 KAIST / 광자유체집적소자연구단
키워드 Interference Lithography; Standing Wave; Ridged Nanostructure; SERS
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