| 학회 | 한국고분자학회 |
| 학술대회 | 2005년 봄 (04/14 ~ 04/15, 전경련회관) |
| 권호 | 30권 1호, p.507 |
| 발표분야 | 유ㆍ무기 나노섬유 소재 |
| 제목 | Synthesis of UV-curable inorganic polymers for SiCN ceramic patterning via photolithography method |
| 초록 | Organic polymer photoresistors have been used to fabricate various structures in semiconductor industry. But there have been no report on the inorganic polymer photoresist although it is expected that preceramic polymers are promising materials to fabricate the non-oxide ceramic structures in micro- or nano-scale using various lithography techniques. In this study, the UV-curable polyvinylsilazane (KiON) was synthesized by chemical modification with 2-isocyanatoethyl methacrylate compound via insertion reaction route. Higher UV sensitivity of the synthesized polymer as well as the effect of photoinitiator concentrations was demonstrated by various analytical techniques. The photocurable preceramic polymer was patterned by application of photolithography, followed by post-thermal curing and pyrolysis at 800oC under nitrogen atmosphere to convert the polymer into the SiCN ceramic pattern. The morphology of the SiCN-based ceramic patterns was characterized by Scanning Electron Microscopy (SEM) and Atom Force Microscopy (AFM). |
| 저자 | 팜안투안, 김동표 |
| 소속 | 충남대 |
| 키워드 | UV curable polymer; photolithography |
