| 학회 | 한국재료학회 |
| 학술대회 | 2004년 가을 (11/05 ~ 11/05, 인하대학교) |
| 권호 | 10권 2호 |
| 발표분야 | 기타 |
| 제목 | Microfluidic Lithography를 이용한 광도파로 적용을 위한 무-유기 하이브리드 패턴의 제조 |
| 초록 | Inorganic-organic hybrid materials for the optical waveguide were synthesized by the sol-gel process starting from the acid-catalyzed solutions of phenyltrimethoxysilane, methyltriethoxysilane, and tetraethylorthosilicate. The control of the refractive index in the organically modified silicate filmswas achieved by varying the content of phenyltrimethoxysilane incorporated as a refractive index modifier. A single spin-coating with the precursor solution produced a crack-free buffer layer of 22 ㎛ thickness with dense microstructure. However, the heat-treatment of the hybrid film above 200 ℃ induced significant cracks on the surface. The refractive index variations and structural changes as a function of heat-treatment condition were analyzed using Fourier transform infrared spectrometer. For the fabrication of the patterned guiding layer on top of the buffer layer, the microfluidic lithography method was employed. The patterned microlines of the linewidth of 20 - 30 ㎛ with a sharp edge definition could form by filling the precursor solutions into the micro channels associated with the PDMS microfluidic device. The patterned guiding layer was optically transparent as similar as the bare quartz glass at the wavelength above 500 nm and had a low propagation loss of 0.77 dB/cm at 1310 nm. |
| 저자 | 정선호, 안성진, 문주호 |
| 소속 | 연세대 |
| 키워드 | inorganic-organic hybrid; waveguide; lithography |
