화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2019년 가을 (10/23 ~ 10/25, 대전컨벤션센터)
권호 25권 2호, p.1940
발표분야 재료 (Materials)
제목 Study on the novel surface modification of ZnO nanowire FET for pH sensor application
초록  In recent years, the importance of detecting ions/molecules based on the ion-sensitive field-effect transistor (ISFET) has driven the researchers toward more sensitive and robust pH sensors application. Despite all the initial challenges to commercialize this academic research, there still remains a significant challenge. In this work, we present the effective surface modification of the nanowire FET device with plasma deposition technology. The systematic experiments were performed to optimize the effective surface modification on the semiconductor nanowire device for the purpose of the improved pH sensing performance. We demonstrate our sensing platform with different pH values in terms of sensitivity and stability.
저자 Mehtab Muhammad, 김진태, 김정수, 지건구, 임연호
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