화학공학소재연구정보센터
학회 한국재료학회
학술대회 2014년 봄 (05/15 ~ 05/16, 창원컨벤션센터)
권호 20권 1호
발표분야 A. 전자/반도체 재료(Electronic and Semiconductor Materials)
제목 Silver based alloy multilayer thin films for optically selective coatings
초록 Low-emissivity (low-e) coatings which exhibit high visible transmittance and high infrared reflection are widely used in window glazing systems and automobile applications to prevent energy loss from the interior to exterior and vice versa. Typically, low-e coated glass structure comprised of a metallic layer is sandwiched between metal oxide/dielectric layers. Silver (Ag) is a potential candidate as a metallic layer in low-e stacks. However, they are thermally unstable at annealing treatment. Hence, in this study, we elaborate the optical properties of the Ag based alloy thin films to enhance the low-e properties and the film durability at elevated temperatures. TiNx have been used as a protective layer for the Ag-based multilayer film to protect the silver form oxidation. The multilayer stacks were deposited on glass substrates at room temperature by D. C and R. F magnetron sputtering. Structure, microstructure, topography, optical properties of the multilayer stacks were studied by Glancing-angle X-ray diffraction, field emission scanning electron microscopy, atomic force microscopy, and Ultra-Violet-Near infrared spectrophotometer. Smooth and dense microstructure was observed due to better adhesion between the TiNx and Ag. In addition, the films showed high visible transmittance and low infrared transmittance.
저자 Chadrasekhar Loka1, Kyoung Ryeol Park2, Nagsen P. Meshram3, Kee-Sun Lee4
소속 1Department of Advanced Materials Engineering, 2Kongju National Univ., 3Cheonan City, 4South Korea.
키워드 thin film; silver; sputtering; transmittance
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