| 초록 |
Self-assembly in block-copolymers (BCPs) has great promise for use in nanolithography and assembly of nanomaterials, with demonstrated capabilities in nanoscale device fabrication. For the practical applications, the rapid, high-resolution method for patterning BCPs with different molecular weights and compositions across a wafer surface, with complex geometries and diverse feature sizes are required. Here, we fabricated the diverse patterns of BCPs based on poly(styrene-block-methyl methacrylate) with various molecular weights and compositions by using electrohydrodynamic jet priting. The printed geometries involved diameters and linewidths into the sub-500 nm, line edge roughness as small as ~45 nm, and with thickness uniformity and repeatability that can approach molecular length scales. Upon thermally annealing on bare or on chemically or topographically structured substrates, such printed patterns yielded nanodomains of BCPs in well-defined sizes, periodicities and orientations. |
