| 초록 |
Progress for advanced semiconductor manufacturing technology has triggered miniaturization of block copolymer (BCP) feature size. To achieve such satisfaction, newly designed fluorine-containing BCP was synthesized for high χ (Flory-Huggins interaction parameter) with small feature size.Combination synthetic method was applied for narrow polymer dispersity with specific volume fraction. To understand the thermodynamic interaction between two blocks, of the synthesized BCP was investigated using small angle X-ray scattering (SAXS). The evaluated χ was above 0.2 over the entire temperature, which is six fold higher compare to PS-b-PMMA (χ~0.03). Smallest feature size was below 8 nm which was measured by SAXS and transmission electron microscopy. |
