| 초록 |
The Physical property of polymeric thin film is challenge to characterize with conventional measurements that is utilized for bulk scale polymer because of confinement effects. Since physical property of polymer is important to fabricate polymeric devices and other applications, characterization methods are required. To address this point, we suggested bi-layered wrinkling system-based metrology that estimate the physical properties of polymeric thin film (below 100 nm) such as elastic modulus and degree of crystallization. The thermally induced wrinkling was employed in the presented metrology system, and two equations that extended parallel/series model and equation from free energy analysis was used for calculation. With this system, we measured elastic modulus and degree of crystallization of PVA thin films which are annealed and cooled with various rates.. |
