초록 |
We introduced nanoporous block copolymer (BCP) thin films self-supported onto Si substrates with open-centered area: two different types of BCPs, polystyrene-block-poly(methyl methacrylate)s (PS-b-PMMAs, spherical PMMA domains) and poly(cyclohexyl ethylene)-block-polyethylene-block-poly(cyclohexyl ethylene) (CEC, cylindrical PE domains), were used in this study. First, minor phases in these BCP thin films were preferentially self-assembled and then selectively removed from cross-linked matrices on the substrates, by solvent treatments. These porous nanostructures were characterized by atomic force microscopy, scanning electron microscopy, and grazing-incidence X-ray scattering. |