| 학회 |
한국고분자학회 |
| 학술대회 |
2011년 봄 (04/07 ~ 04/08, 대전컨벤션센터) |
| 권호 |
36권 1호 |
| 발표분야 |
고분자 구조 및 물성 |
| 제목 |
Fabrication of nanostructured template by colloidal lithography |
| 초록 |
Self-assembly of colloidal nanospheres is an effective method for fabrication of long range ordered nanostructures. Colloidal lithography utilizes both the ordered packing of self-assembled colloidal crystals and the spherical shape of individual nanospheres to fabricate ordered nanostructure arrays. In this work, nanopillars or nanoporous structure on silicon substrates and polymer substrates are fabricated over large area by combination of colloidal lithography and plasma etching technique. The size of deposited colloidal nanosphere can be controlled by oxygen plasma processes through control of radio-frequency(RF) power, etching time and pressure, etc., which accordingly enables to manipulate the sizes of nanopillars and nanoporous. In addition, such nanostructure substrates are used to generate nanostructured polymer and block copolymer films. |
| 저자 |
이진욱1, 김원호1, 김세원1, 김승현1, 이근용2, 곽영제3
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| 소속 |
1인하대, 2한양대, 3숭실대 |
| 키워드 |
Colloidal lithography; Nanopillar; Nanoporous
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| E-Mail |
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