초록 |
Block copolymer (BCP) self-assembly has emerged as a powerful tool for nanopatterning and nanofabrication due to its ease and versatility. However, BCP self-assembly for bottom-up nanofabrication processes creates only simple, periodic patterns that are predetermined by the intrinsic properties of BCPs, such as their molecular weight and composition. Very recently, several strategies to direct the self-assembly of BCPs have been proposed for effective control of BCP nanostructures. In this work, we offer a simple route to create nanopatterns by colloidal particles lithography and BCP self-assembly. The nanopatterns on hundreds nanometer scales were first fabricated by using colloidal particles, and then BCP films were deposited on the substrates with colloidal patterns that they are able to guide BCP self-assembly. This approach provides efficient way to guide BCP self-assembly without use of top-down approach that would be expensive and inaccessible on the nanometer scale. |