| 초록 |
Atomic force microscope (AFM) lithography is one of good methods for fabrication of nanostructure using organic thin films. Poly(3,4-ethylenedioxythiophene) (PEDOT) is a conducting polymer based on a heterocyclic thiophene ring bridged by two electron-donating oxygen atoms. It can be spin-coated on various conductive and non-conductive substrates. Before this study was investigated, we had expected that when use different dopants, lithography property may differ from one another. So, we used Batron P and PES-SIN. The dopants for each Batron P and PES-SIN are poly(4-styrenesulfonate) (PSS) and di(2-ethylhexyl)sulfosuccinate (DEHS). I-V curves for Batron P and PES-SIN thin films were measured to confirm different properties for Batron P and PES-SIN. In this study, we fabricated patterns on PEDOT thin film using atomic force microscopy. |
