| 학회 |
한국고분자학회 |
| 학술대회 |
2011년 가을 (10/06 ~ 10/07, 김대중 컨벤션센터) |
| 권호 |
36권 2호 |
| 발표분야 |
기능성고분자－막분리용 고분자 |
| 제목 |
Template-Assisted Fabrication of Highly Ordered Freestanding Titanium Oxide Nanotube Arrays via Si-Containing Block Copolymer Lithography and Atomic Layer Deposition. |
| 초록 |
Highly ordered freestanding TiO2 nanotube arrays with various wall thicknesses were fabricated by applying atomic layer deposition (ALD) to the nanoporous templates with high aspect ratios. The high thermal stability of the cross-linked organic template allowed high-temperature ALD. Easy removal of the organic template by a dry etch process followed by calcination produced vertically aligned and highly crystalline anatase TiO2 nanotube arrays without collapse or bundling. Furthermore, the ultrafine thickness tunability of the ALD process made it possible to develop TiO2 nanorods as well as nanotubes with different wall thicknesses. In addition, freestanding nanotube arrays were manufactured from TiO2-based multi-component films of TiO2/Al2O3/TiO2 nanolaminates and Ti-Al-O mixed-phase films. |
| 저자 |
조경천1, 김진백1, 박창홍1, 구세진1, 권세훈2
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| 소속 |
1한국과학기술원, 2부산대 |
| 키워드 |
TiO2; Block Copolymer; Nanotube; Atomic Layer Deposition
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| E-Mail |
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