화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2007년 가을 (11/02 ~ 11/03, 한경대학교)
권호 11권 2호
발표분야 무기재료
제목 Characterization and Microfabrication of Allylhydrocarbosilane glass microfluidic channels via imprint lithography
초록 In this study, we reported on the fabrication of non-oxide ceramic microfluidic channels from preceramic polymers with soft lithographic techniques for the applicable potentials of the photochemical reaction. The preceramic polymer layer of the glass surface was cured by the UV and then thermal methods for complete crosslinking and formation of transparent, solvent resistant microchannels.
저자 민경익, 김동표
소속 충남대
키워드 non-oxide ceramic; microfluidic channels; soft lithographic techniques
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