| 초록 |
Inorganic and coating layers, such as sol-gel, acrylate, SiOx, and coating from HMDSO deposition without oxygen, were deposited over polyethylene napthalate (PEN) substrate and their effect on the water vapor transmission rate (WVTR) were studied. Inorganic SiOx layer was formed over PEN by plasma polymerization of hexamethyldisiloxane (HMDSO) in a reactive ion etching mode with RF power of 300 W, and O2 flow rate of 20 sccm. FT-IR spectra showed Si-O-Si stretching and bending peaks at 1060 ~ 1170 cm-1 and 800 ~ 820 cm-1, respectively. Acrylate coating was applied over SiOx coated PEN substrate by UV-light irradiation at 365 nm for 40 min. FT-IR spectra showed significant decrease in the peak intensities of C=C at 1635 cm-1 and 810 cm-1, it indicates the crosslinking of acrylate monomers. The WVTRs of bare PEN substrate and PEN/SiOx/acrylate/SiOxs were 6.95 g/m2/day and 4 x 10-4 g/m2/day, respectively. |
