| 초록 |
We have developed a novel approach to fabricate hierarchically organized vertical CNT arrays by combining plasma-enhanced CVD (PECVD) with self-assembled block copolymer nanotemplates. Unlike other nanopatterning techniques such as focused electron-beam lithography or scanning probe lithography, block copolymer assembly is a parallel patterning process, thereby enabling easy scale-up. In our approach, an asymmetric block copolymer, polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) has been used to form cylindrical nanostructures. These assemblies have been used as nanotemplates for the hierarchical organization of CNTs. The CNTs are uniform in diameter and the lateral distribution of the CNTs is hierarchically ordered and follows the distribution of the catalyst particles. The morphology of individual CNTs and the 3D organization of CNTs are both independently tunable. It suggests interesting possibilities for the device integration of various functional nanomaterials. |
