초록 |
The lamellar microdomains for the thin films of a symmetric polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) on random copolymer-grafted substrates were investigated during solvent vapor annealing process. We studied a series of morphological development of block copolymer thin films such as perpendicularly orientated lamellar microdomains, dewetting, and disorientation as a function of annealing time. The effects of temperature and thickness on film stability were investigated in terms of ordering process in lamellar microdomains using optical microscopy (OM), Scanning Force Microscopy (SFM), and in-situ spectroscopic ellipsometery. |