학회 |
한국고분자학회 |
학술대회 |
2009년 봄 (04/09 ~ 04/10, 대전컨벤션센터) |
권호 |
34권 1호 |
발표분야 |
기능성 고분자 |
제목 |
PREPARATION OF POROUS THIN FILMS OF ALIPHATIC POLYIMIDES |
초록 |
It is required to develop insulating materials with low dielectric constants for achievement of high integration and speed in semiconductor. In this work triblock copolymers consisting of an aliphatic polyimide block and a thermal labile polymer block have been prepared from an alicyclic dianhydride, an alicyclic diamine, and an amine-terminated poly(propylene glycol) (PPG). The thermal properties of the copolymers were investigated by thermogravimetric analysis (TGA) and differential scanning calorimetry (DSC). Thermal decomposition of the labile block in the copolymers was carried out to obtain porous polyimide film, which were characterized with a scanning electron microscope(SEM). |
저자 |
유환철1, 조성열1, Kazuaki Kudo2, 정찬문3
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소속 |
1연세대, 2Institute of industrial science, 3The Univ. of Tokyo |
키워드 |
aliphatic polyimide; dielectric constant
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E-Mail |
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