| 초록 |
In this research, the facile formation of carbon micropatterns (CMs) from a thin film of cheap pitch was investigated by proton beam lithography and pyrolysis, and their use as an electric heating element was demonstrated. Proton beam lithography of pitch thin films spin-coated on an inorganic substrate was optimized under the various conditions. The well-defined negative patterns formed at the optimized fluence of 3 x 1015 ions/cm2 were then pyrolyzed at various temperatures to create the CMs. Based on the analytic results, the CMs formed at higher temperature exhibited good electrical conductivity. Moreover, the CMs showed the good electric heating characteristics, demonstrating the possibility of using the CMs as a cheap electric heating element. |
