| 학회 | 한국재료학회 |
| 학술대회 | 2003년 가을 (11/21 ~ 11/22, 연세대학교) |
| 권호 | 9권 2호 |
| 발표분야 | Display |
| 제목 | 구리 첨가가 Ni-MILC에 미치는 효과에 대한 연구 |
| 초록 | It has been well known that Ni-MILC TFTs are acceptable for operation of LCD devices but still decrease of annealing temperature is desirable for the future devices like LCD on the plastic substrate. In this work, Cu was added to Ni-MILC in an attempt to lower the annealing temperature and enhance the MILC rate. It has been found that even small amount of Cu addition enhances the MILC rate considerably. Also well type MILC can be distinguished from island type, which cannot be observed in pure Ni-MILC. Poly TFTs were fabricated with Cu/Ni-MILC and the effects of copper addition on the electrical properties were carefully investigated. Details of crystallization phenomenon and electrical properties of thus fabricated MILC poly TFTs will be presented with prospect. |
| 저자 | 이정화, 윤여건, 주승기 |
| 소속 | 서울대 |
| 키워드 | MILC; TFT-LCD; LTPS; Cu-MILC |
