| 번호 | 제목 |
|---|---|
| 14 |
Effect of microwave irradiation on electrical and optical properties of ZnO thin films grown by atomic layer deposition Hyunwoo Yuk, Hyeongsu Choi, Namgue Lee, Hyunwoo Park, Yeonsik Choi, Junghoon Lee, Hyeongtag Jeon 한국재료학회 2020년 봄 학술대회 |
| 13 |
SiNx deposition using CSN-2 and H2 and N2 plasmas by remote plasma atomic layer deposition Suhyeon Park, Chanwon Jung, Byunguk Kim, Jungwoo Kim, Yurim Kwon, Seokhwi Song, Hyeongtag Jeon 한국재료학회 2019년 봄 학술대회 |
| 12 |
Structural and Electrical characteristics of Low-k Silicon Oxycarbide thin film deposited via Remote Plasma Atomic Layer Deposition Yurim Kwon, Chanwon Jung, Jongwoo Kim, Suhyeon Park, Byunguk Kim, Seokhwi Song, Hyeongtag Jeon 한국재료학회 2019년 봄 학술대회 |
| 11 |
The Characteristics of Field Effect Transistor using Tin Disulfide by Atomic Layer Deposition Giyul Ham, Seokyoon Shin, Juhyun Lee, Namgue Lee, Hyeongtag Jeon 한국재료학회 2017년 봄 학술대회 |
| 10 |
Al2O3 Thin Film Encapsulation by Spatial Atomic Layer Deposition Seokyoon Shin, Giyul Ham, Joohyun Park, Juhyun Lee, Hyeongsu Choi, Sejin Kwon, Hyeongtag Jeon 한국재료학회 2017년 봄 학술대회 |
| 9 |
Al2O3 Thin Film Encapsulation by Ozone-based Atomic Layer Deposition Seokyoon Shin, Giyul Ham, Joohyun Park, Juhyun Lee, Hyeongsu Choi, Seungjin Lee, Sejin Kwon, Hyeongtag Jeon 한국재료학회 2016년 가을 학술대회 |
| 8 |
The Chracteristics of SiO2 Thin Film Deposited by Remote Plasma Atomic Layer Deposition using BTBAS precursor Hyeongtag Jeon, Honggi Kim 한국재료학회 2015년 가을 학술대회 |
| 7 |
Crystallinity and energy band structure of atomic layer deposited ZrO2 films using Cp-Zr precursor Hyoseok Song, Hyeongtag Jeon 한국재료학회 2015년 봄 학술대회 |
| 6 |
Characteristics of TiO2 thin film by remote plasma atomic layer deposition using a novel Ti precursor Chunho Kang, Heeyoung Jeon, Woochool Jang, Hyunjung Kim, Hyoseok Song, Honggi Kim, Hyeongtag Jeon 한국재료학회 2014년 가을 학술대회 |
| 5 |
The effects of Al2O3 passivation with HfO2 as a buffer layer on a-IGZO TFTs Heewang Yang, Hagyoung Choi, Joohyun Park, Seokyoon Shin, Giyul Ham, Sanghun Lee, Hyeongtag Jeon 한국재료학회 2012년 가을 학술대회 |
