| 학회 | 한국재료학회 |
| 학술대회 | 2021년 봄 (05/12 ~ 05/14, 광주 김대중컨벤션센터) |
| 권호 | 27권 1호 |
| 발표분야 | G. 나노/박막 재료 분과 |
| 제목 | Mass transport barrier using Multi-Layer Graphene |
| 초록 | The effect of Multi-layer Graphene(MLG) coating on copper film on the stability of film and the ability as mass transport barrier was studied. According to the previous research, when Single Layer Graphene(SLG) is coated on metal, metals such as Cu and Ag and Cu-Ni alloy are protected from oxidation and corrosion, and diffusion to Si and SiO2 can be prevented. However, if a defect occurs during the SLG process, the diffusion of metal is concentrated on the defect and the barrier ability is lost. To improve this, we intend to use graphene as a mass transport barrier by stacking graphene as a multi-layer to reduce the probability that defects in individual graphene layers are aligned in a row. In this study, we will focus on improving the thermal stability of Graphene-copper-Graphene samples made by repeating the wet transfer method. In order to check the thermal stability, the melting point through DTA analysis and after high-temperature heat treatment, the surface condition is analyzed through OM, SEM, and AFM to find out the possibility of applying the copper film protected by MLG to the high-temperature process. |
| 저자 | 신호준, Daba Deme Megersa, 류학기 |
| 소속 | 아주대 |
| 키워드 | <P>graphene; mass trasport barrier; thermal stability; wet transfer method</P> |
