| 초록 |
In this study, we introduce a simple approach to fabricating highly ordered, perpendicular lamellae through the self-assembly of high-molecular-weight polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA). Using a solvent vapor annealing (SVA) process controlled by modulating the temperature gap between the chamber and bottom plate, followed by a subsequent thermal annealing process, perpendicularly oriented lamellae was investigated. Highly ordered line-arrays composed of perpendicularly oriented lamellae were confined to a large-width topographic line pattern by a controlled SVA process. This study suggests a simple and efficient route to fabricating long-range lateral ordering in BCP self-assembled structures. |
