| 초록 |
To characterize gyroid structure of block copolymer on thin film, the grazing incidence X-ray scattering (GIXS) experiment was performed with aid of synchrotron source. GIXS pattern obtained for polystyrene-b-polyisoprene (PS-b-PI) diblock copolymer thin films on silicon substrates with native oxide layers was quantitatively analyzed by using GIXS formula which was fully developed in our previous study. Moreover, we also simulated 2D GIXS pattern from model approach which was used the triply periodic minimal surfaces for gyroid form factor. The triply periodic minimal surfaces approach shows good agreement between simulated 2D pattern and experimental pattern. This study show good results for the simulation of 2D GIXS pattern for the gyroid structure developed in PS-b-PI diblock copolymer thin film, and provided some keys to analysis of the gyroid structure. |
