| 초록 |
The triboelectric nanogenerator (TENG) has been developed as a promising technology for mechanical energy harvesting with high output power, easy fabrication, low cost advantage and structure diversity of device. To obtain incomparable performance of TENG, many researchers have developed various methods including chemical and geometrical surface modifications for larger contact area and lots of triboelectric charge. Among them, it has been reported that significantly enhanced output-power can be generated owing to simply nano-fabricated patterns, so this approach has gained much recent-attention. In this research, we apply a facile 100 nm-pitch grate-patterned triboelectric nanogenerator. Based on the process of stitch-less and repetitive pattern downscaling technology by forming and etching multiple spacer layer, we introduce centimeter scale-long 100 nm-pitch nano-grating template with large-area (8-inch). Using this template, we developed a fast and facile method for 100 nm-pitch defect-less grate-pattern array on a common plastic substrate through replication technique. The fabricated disposable nano-patterned plastic substrate followed electrode deposition serves as friction surface of TENG to increase the output performances of TENG by forming the large effective contact surface area. The nanograting based-surface for TENG presented the increase of corresponding current and voltage as well as output power compared to the non-patterned TENG. This novel technology for triboelectric energy harvesting can induce new electronics innovations in triboelectricity and widely expand its applications as not only efficient energy sources but also various sensor. |
